Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
0 views
•
2020
•
Cited by 11
•
Bioengineering1Department of Electrical Engineering and Computer Science, University of Michigan, 2Veteran Affairs Ann Arbor Healthcare System, 3Department of Neurology, School of Medicine, University of Michigan, 4Department of Biomedical Engineering, University of Michigan, 5Michigan Center for Materials Characterization, University of Michigan, 6Carl Zeiss SMT, Inc.