10:28Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization0 views•2016•Cited by 5•EngineeringThomas Bourgade1, Sun Jianfei1, Zhaomin Wang1, Rosmin Elsa2, Anand Asundi1,2Thomas Bourgade1Sun Jianfei1Zhaomin Wang1Rosmin Elsa2Anand Asundi1,21School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte LtdSchool of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological Universityd'Optron Pte Ltd
