11:44Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators0 views•2014•EngineeringJoshua Small1, Adam Fruehling2, Anurag Garg3, Xiaoguang Liu1, Dimitrios Peroulis3Joshua Small1Adam Fruehling2Anurag Garg3Xiaoguang Liu1Dimitrios Peroulis31Department of Electrical and Computer Engineering, University of California, Davis, 2Digital Light Projection (DLP) Technology Development, Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue UniversityDepartment of Electrical and Computer Engineering, University of California, DavisDigital Light Projection (DLP) Technology Development, Texas InstrumentsBirck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University